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User’s Guide

Volume 2

Measurement and Analysis

Agilent 4155B Semiconductor Parameter Analyzer

Agilent 4156B Precision Semiconductor Parameter Analyzer

Agilent Part No. 04156-90200

Printed in Japan

May 2000

Edition 5

Silicon

Investigations

Repair

Information

- Contact

920-955-3693

www.siliconinvestigations.com

Summary of Contents for 4156b

Page 1: ...4155B Semiconductor Parameter Analyzer Agilent 4156B Precision Semiconductor Parameter Analyzer Agilent Part No 04156 90200 Printed in Japan May 2000 Edition 5 Silicon Investigations Repair Informatio...

Page 2: ...return the product to Buyer However Buyer shall pay all shipping charges duties and taxes for products returned to Agilent Technologies from another country Agilent Technologies does not warrant that...

Page 3: ...ilent Technologies or its suppliers be liable for loss of date or for direct special incidental consequential including lost profit or date or other damage whether based in contract tort or otherwise...

Page 4: ...S 1 LED PRODUCT GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the...

Page 5: ...handling testing and adjusting Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this...

Page 6: ...ormed or adhered to could result in injury or death to personal CAUTION The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not corre...

Page 7: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 Printing History Edition 1 August 1997 Edition 2 September 1997 Edition 3 October 1998 Edition 4 January 2000 Edition 5 May 2000...

Page 8: ...cribes how to perform measurements Analyzing Measurement Results This chapter describes how to analyze measurement results manually and automatically Screen Organization This chapter provides informat...

Page 9: ...7 Synchronous Sweep Measurement 2 9 Pulse Sweep Measurement 2 11 Sampling Measurement Mode 2 14 Available Units 2 14 Sampling Interval and Measurement Time 2 15 Sampling Measurement Data 2 18 Sampling...

Page 10: ...ftkey 3 23 CONST SETUP Softkey 3 25 Analysis of the Knob Sweep Measurement Results 3 26 Standby Function 3 27 Standby Channels 3 27 Standby State 3 27 Available Units and Output Values 3 28 Output Val...

Page 11: ...48 Setups 3 50 Circuit Diagram 3 51 Measurement Ranging Mode 3 53 Auto Ranging 3 54 Limited Auto Ranging 3 55 Compliance Range 3 56 Fixed Range 3 56 Compliance 3 57 Voltage and Current Compliance 3 5...

Page 12: ...7 To Display Graphics Results 4 28 To Display List Results 4 30 To Execute Calibration 4 31 To Use Offset Cancel Function 4 31 To Execute or Stop Measurement 4 32 To Use R Box 4 33 Knob Sweep Measurem...

Page 13: ...o Specified Point of Measurement Curve 5 14 To Draw Regression Line for Specified Region 5 16 To Display and Select a Line 5 18 To Display Grid on the Graph 5 18 To Change Data Variable on Graph 5 19...

Page 14: ...TUP screen 6 29 MEASURE OUTPUT SEQUENCE screen 6 32 DISPLAY Screen Group 6 35 DISPLAY DISPLAY SETUP screen for graphic results 6 36 DISPLAY DISPLAY SETUP screen for list results 6 38 DISPLAY ANALYSIS...

Page 15: ...a Variable 7 3 Data Variable for Output or Measurement Data 7 3 User Function 7 5 User Variable 7 6 Syntax of Data Variable Name 7 7 Expression 7 8 Built in Function 7 11 ABS 7 12 AT 7 12 AVG 7 12 CON...

Page 16: ...L1G2 7 26 L1X 7 27 L1Y 7 27 L1Y1 7 27 L1Y2 7 27 L2CO 7 27 L2G 7 28 L2G1 7 29 L2G2 7 30 L2X 7 31 L2Y 7 31 L2Y1 7 31 L2Y2 7 31 MI 7 31 MX 7 32 MY 7 32 MY1 7 32 MY2 7 32 Analysis Function 7 33 Marker on...

Page 17: ...f Noise Affects the Measured Values 8 7 If Measured Voltage has some Error when Forcing a Large Current 8 8 If Large Current Causes High Temperature Thermal Drift 8 8 If Measurement Takes More Time th...

Page 18: ...Contents 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents...

Page 19: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 Measurement Units...

Page 20: ...tput and measurement functions of each measurement unit For the following units a simplified circuit diagram is shown and where applicable the output and measurement ranges are provided Ground Unit GN...

Page 21: ...ound Unit GNDU The ground unit GNDU is in Agilent 41501A B SMU and pulse generator expander The GNDU is a 0 V constant source that provides a measurement ground reference and can sink up to 1 6 A Figu...

Page 22: ...e following three modes voltage source and current monitor mode V source and I monitor mode current source and voltage monitor mode I source and V monitor mode source common mode SMU can output consta...

Page 23: ...th either two MPSMUs or one HPSMU HPSMU high power SMU Force and measure up to 200 V or 1 A Maximum output power 20 W Only the 41501A B has HPSMU The 41501A B can be equipped with either two MPSMUs or...

Page 24: ...itor Unit SMU Figure 1 3 HRSMU Output and Measurement Ranges Table 1 1 HRSMU Output Voltage Ranges and Resolutions Range Output Value Output Resolution Current Compliance Range 2 V 0 V 2 V 100 mV 100...

Page 25: ...igh Speed Sampling Measurement c c This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter 1PLC or Longer 640 ms to 1 92 ms 80 ms to 560 ms 2 V 0 V 2 2 V 2...

Page 26: ...0 ms to 560 ms Integration Time High Speed Sampling Measurement c c This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter 1PLC or Longer 640 ms to 1 92 m...

Page 27: ...itor Unit SMU Figure 1 4 MPSMU Output and Measurement Ranges Table 1 5 MPSMU Output Voltage Ranges and Resolutions Range Output Value Output Resolution Current Compliance Range 2 V 0 V 2 V 100 mV 100...

Page 28: ...s to 560 ms Integration Time High Speed Sampling Measurement c c This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter 1PLC or Longer 640 ms to 1 92 ms 8...

Page 29: ...ment see the column of Integration Time 80 ms to 560 ms Integration Time High Speed Sampling Measurement c c This column is applied to the sampling measurement that initial interval is set to 480 ms o...

Page 30: ...igure 1 5 HPSMU Output and Measurement Ranges Table 1 9 HPSMU Output Voltage Ranges and Resolutions Range Output Value Output Resolution Current Compliance Range 2 V 0 V 2 V 100 mV 1000 mA 20 V 0 V 20...

Page 31: ...c This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter 1PLC or Longer 640 ms to 1 92 ms 80 ms to 560 ms 2 V 0 V 2 2 V 2 mV 20 mV 200 mV 2 mV 20 V 0 V 2...

Page 32: ...or the limited auto ranging For fixed ranging maximum mea surement value is Range column value Measurement Resolutions b b Measurement resolution depends on the integration time setting For Knob swee...

Page 33: ...ource you can set current compliance as follows voltage compliance If you use SMU as pulse current source you can set voltage compliance as follows When I 10 mA voltage compliance must be 2 V or less...

Page 34: ...Source Unit VSU Figure 1 6 shows a simplified voltage source unit VSU circuit diagram Figure 1 6 Simplified VSU Circuit Diagram VSU can force up to 20 V Only range available is 20 V range with 1 mV re...

Page 35: ...it VMU Voltage monitor unit VMU has two measurement modes grounded or differential Grounded mode uses one VMU Differential mode uses two VMUs Figure 1 7 shows a simplified VMU circuit diagram Figure 1...

Page 36: ...g time charge connecting DUT to the measurement terminal may damage the DUT by the discharging For the details of how to prevent this damage refer to If Measurement Damages the Device under Test in Ch...

Page 37: ...UT Very high impedance DUT may cause measurement error due to the input leakage current from VMU To check the measurement error perform voltage measurement as follows 1 Connect SMU to the DUT 2 Force...

Page 38: ...lue that is output if the PGU output terminal is open So when a load is connected and PGU impedance is set to 50 W the actual output value will be different For example if connected load is 50 W speci...

Page 39: ...nt You cannot set different values for each PGU Pulse period pulse width delay time Each parameter has six setting ranges as shown in Table 1 15 Table 1 15 Ranges of Pulse Period Pulse Width and Delay...

Page 40: ...transition time pulse period pulse width 0 8 Leading and trailing edge transition times for a PGU must be in the same range Output impedance You can select 50 W or Low impedance Trigger output PGUs ou...

Page 41: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 Measurement Mode...

Page 42: ...156B User s Guide Vol 2 Edition 5 Measurement Mode This chapter explains measurement modes of Agilent 4155B 4156B The 4155B 4156B has the following two measurement modes Sweep Measurement Mode Samplin...

Page 43: ...sweep sources VAR1 VAR2 and VAR1 The 4155B 4156B provides three types of sweep measurement Basic Sweep Measurement One sweep source VAR1 is used Subordinate Sweep Measurement A primary VAR1 and secon...

Page 44: ...sweep types are available LIN LOG Linear staircase Logarithmic staircase SWEEP MODE Single Source channel sweeps the output from user specified start value to stop value Double Source channel sweeps...

Page 45: ...ired SMU or VSU on CHANNELS CHANNEL DEFINITION page Parameters Also specify the following parameters for VAR1 on MEASURE SWEEP SETUP page Parameter Description sweep mode Single or double sweep linear...

Page 46: ...is invalid Number of sweep steps is calculated from start stop and number of steps in one decade which is specified by log parameter Calculated number of steps must be in range 2 to 1001 compliance Co...

Page 47: ...incremented or decremented by the specified step value then the primary sweep source is swept again Figure 2 2 Subordinate Sweep Measurement To set up the subordinate sweep measurement select the foll...

Page 48: ...mber of secondary sweep steps Allowable range 1 to 128 NOTE Stop value Stop value of secondary sweep is calculated from start step and number of steps Allowable range of stop depends on the output ran...

Page 49: ...offset value and ratio Figure 2 3 Synchronous Sweep Measurement To set up synchronous sweep measurement select the following on CHANNELS CHANNEL DEFINITION page VAR1 function for desired primary swee...

Page 50: ...source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of synchronous sweep source For the compliance range of each measurement channel refer to Chapt...

Page 51: ...pulse source Figure 2 4 shows the relationship between pulse source and other sources Figure 2 4 Pulse Source and Other Sources For the pulse sweep measurement the delay time of the primary sweep sou...

Page 52: ...output starts to change from base value to time when SMU starts to return from peak value Measurements are made while the peak value is output Allowable range 0 5 ms to 100 ms Resolution 100 ms base v...

Page 53: ...Mode NOTE Pulse width If the measurement settings do not meet the following conditions pulse width setting of SMU may be insufficient to make measurement If so the pulse width is automatically change...

Page 54: ...asurement Thinned out Sampling Measurement Logarithmic Sampling Measurement Available Units Available units and functions for sampling measurement are shown below n a means This is not available for s...

Page 55: ...and so on So if you want to execute sampling measurement with the specified sampling interval you need to know the actual measurement time upon your measurement setup and set the sampling interval val...

Page 56: ...s Time Starts Sampling Stops Sampling Trigger Trigger Trigger Trigger Trigger Case 1 Sampling Interval Meas Time SMU Output Sampling Interval Sampling Interval PGU Output Hold Time Total Sampling Time...

Page 57: ...asure Measurement result data is stored in memory Case 2 Measurement unit waits next trigger if it is busy or in measurement 7 Repeats steps 5 and 6 until that a sampling completion condition is satis...

Page 58: ...his is available for the measurement points in the first decade TIME Thold Tinterval INDEX 1 N where TIME Measurement start time Thold Hold time Tinterval Sampling interval INDEX Data index N Number o...

Page 59: ...g multiple measurement units Differences between this measurement and the measurement using only one unit are shown below Measurement Sequence Measurement units start measurement in the order below Pa...

Page 60: ...pling For linear sampling setting TOTAL SAMP TIME to auto enables this sampling completion condition Stop front panel key The Stop front panel key is pressed GPIB Command The 4155B 4156B receives GPIB...

Page 61: ...time in second This is the time from starting sampling measurement to enabling this function Allowable range 0 to INITIAL INTERVAL 32767 s Resolution INITIAL INTERVAL NAME Name of measurement data or...

Page 62: ...n Source unit output sequence and the time origin depends on the setup value of the OUTPUT SEQUENCE MODE OF SAMPLING field in the MEASURE OUTPUT SEQUENCE screen The following two modes are available f...

Page 63: ...s output in the order defined in the OUTPUT SEQUENCE table of the MEASURE OUTPUT SEQUENCE screen Time Origin is when the last source reaches the specified output value See figure below If there is pul...

Page 64: ...on is not satisfied Example Operation This example assumes the following sampling setup INITIAL INTERVAL value is longer than the measurement time NO OF SAMPLES value is set to 10 TOTAL SAMP TIME is l...

Page 65: ...SETUP page See Table 2 1 Parameter Description MODE Sampling mode LINEAR INITIAL INTERVAL The sampling interval for first NO OF SAMPLES samples Allowable range 60 ms to 65 535 s NO OF SAMPLES Number...

Page 66: ...be more than the sum of the measurement time by all units d If compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging m...

Page 67: ...condition is not satisfied Example Operation This example assumes the following sampling setup INITIAL INTERVAL value is longer than the measurement time NO OF SAMPLES value is set to 10 1 Executes on...

Page 68: ...ling interval during thinned out sampling Allowable range 720 ms to 65 535 s NO OF SAMPLES Number of data to be stored by end of measurement Maximum 10001 If there are multiple measurement units this...

Page 69: ...hen starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time e Integration time is an element of the measurement time...

Page 70: ...rval of trigger is constant setting value of INITIAL INTERVAL 6 Measurement unit executes measurement if it is ready to measure Measurement result data is stored in memory Measurement unit waits next...

Page 71: ...ms 40 ms 50 ms 60 ms 70 ms 80 ms 90 ms 100 ms LOG10 mode allows to have 10 data in 1 decade Therefore all measurement data is stored in memory 100 ms to 1 s There are 90 sampling points in this range...

Page 72: ...d in memory Tlog Ttarget Tlog Ttarget Ttarget Tprev where Tlog Data stored in TIME Actual measurement point Ttarget Target value of TIME The values can plot data on the logarithmic X axis in the same...

Page 73: ...surement One of the sampling completion conditions so sampling stops after this point elapses Maximum 11 decades HOLD TIME Hold time This is the time from starting source output to first trigger If th...

Page 74: ...the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time e Integration time is...

Page 75: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 Measurement Functions...

Page 76: ...used in measurements Agilent 4155B 4156B has the following useful measurement functions Stress Force Function Knob Sweep Function Operation States Standby Function Output Sequence Trigger Function SM...

Page 77: ...stress as shown in the following figure Stress is defined as the bias that the 4155B 4156B can monitor the bias output time correctly To start stress force press Stress front panel key displaying the...

Page 78: ...me SMU as a measurement channel in the measurement state and as a stress force source in the stress force state To set a unit to the stress channel select SYNC in the FCTN field for the unit If you se...

Page 79: ...Selector Control on page 3 46 External Stress Source The following trigger functions allow you to force stress from more than 4 channels by using external pulse generators voltage sources or current...

Page 80: ...ime is determined by the pulse count and pulse period The pulse count mode is used only when a PGU is used to force ac stress that is PGU is set to MODE VPULSE and FCTN SYNC on the STRESS CHANNEL DEFI...

Page 81: ...ss NSYNC channel specified source value or pulse output The output sequence of the channels depends on the order specified on the MEASURE OUTPUT SEQUENCE screen For details refer to Sequential Mode on...

Page 82: ...ate the outputs of the channels are returned to 0 V in opposite order that forcing occurred Delay time of PGUs When PGUs are set to VPULSE ac source you can set a delay time as follows If PGU is set t...

Page 83: ...Force Sequence output sequence from idle state to the stress state 1 PGU1 2 SMU1 3 PGU2 4 SMU2 5 SMU3 stress force sequence in the stress force state The stress force channels PGU1 PGU2 and SMU3 star...

Page 84: ...til stress is forced for 10 seconds Setting the Stress Stop Function You can select one of the following in the STRESS Status field on the STRESS STRESS SETUP screen STRESS Status CONT AT ANY Stress c...

Page 85: ...re being performed When knob sweep measurements are started the VAR1 start value and VAR1 sweep range are 0 V or 0 A You change the sweep range from 0 to the stop value by rotating the knob To stop th...

Page 86: ...e value b Settings on the MEASURE OUTPUT SEQUENCE screen also apply to knob sweep measurement Item Sweep Measurement Knob Sweep Measurement Spacing of VAR1 linear or log linear Sweep Mode of VAR1 sing...

Page 87: ...NGE the default is the stop value specified for the VAR1 channel on the MEASURE SWEEP SETUP screen Polarity The following sweep polarities are available for the knob sweep function of the VAR1 source...

Page 88: ...SIGN softkey on the KNOB SWEEP screen then selecting the desired secondary softkey You can select one measurement channel only so the Y2 axis is not available on the KNOB SWEEP screen default measurem...

Page 89: ...tart value is always 0 and does not depend on the polarity You cannot set the start value So the START setting on the MEASURE SWEEP SETUP screen has no meaning for the knob sweep function Stop Value S...

Page 90: ...EEP screen the long cursor is always displayed and you cannot turn it off In the CURSOR field coordinate values of the cursor are displayed in X Y order X axis setting X axis always plots the VAR1 sou...

Page 91: ...user function variable in the softkey label When you select a secondary softkey the maximum absolute value s of the Y axis are changed to compliance value of the selected measurement channel SETUP COP...

Page 92: ...ey toggles polarity as follows default If polarity of VAR1 stop and start value on MEASURE SWEEP SETUP screen are same default value is same as polarity of stop and start value If polarity of VAR1 sto...

Page 93: ...ght end of X axis Maximum axis value is at left end of X axis default NORMAL Y AXIS DISPLAY NORMAL Selects direction of the Y axis This softkey displays present setting setting Selecting this softkey...

Page 94: ...ASURE SWEEP SETUP screen POLAR ITY POS Selects polarity of sweep source Changing the setting resets the sweep step to 0 so the sweep measurement curve goes back to 0 on the screen For details see Swee...

Page 95: ...s depend on the output range of the measurement unit See Chapter 1 default Minimum value that includes VAR1 start and stop value that is set on the MEASURE SWEEP SETUP screen However the value must be...

Page 96: ...OLD TIME 0 00s Sets hold time This softkey displays present setting setting Press this softkey to display the hold time in the data entry area Then you can change the setting value by using the rotary...

Page 97: ...tart value in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range Depends on the measurement unit See Chap...

Page 98: ...or arrow keys in the Edit key group setting range 1 to 128 default VAR2 number of steps on MEASURE SWEEP SETUP screen COMPLI ANCE 2 00 V Sets compliance value for VAR2 channel This softkey displays p...

Page 99: ...nstant source The second line displays source output value For SMUs the third line displays compliance value For other units the third line is blank Example If an SMU is set as follows the following s...

Page 100: ...are displayed on the GRAPH LIST screen Then you can use analysis functions To Use User Function If you want to use user functions in GRAPH LIST screen group do following before entering to the knob s...

Page 101: ...standby channel as the stress channel The standby channels keep the standby output when the 4155B 4156B is in the stress force state Standby State Before starting or after stopping a measurement or s...

Page 102: ...VSU PGU VAR1 VAR2 VAR1 V START START I START VPULSE BASE IPULSE BASE CONST V SOURCE SOURCE SOURCE I SOURCE VPULSE BASE Specified pulses b b Pulses as defined in MEASURE PGU SETUP screen If both PGUs a...

Page 103: ...nce of measurement units is defined on the MEASURE OUTPUT SEQUENCE screen Example output sequence setup is shown in the following table and Figure 3 2 shows timing diagram of this example Figure 3 2 E...

Page 104: ...etups of standby channels do not change FCTN MODE Parameters VAR1 VAR2 V START STOP COMPLIANCE a a This parameter is checked for SMUs only I START COMPLIANCE VPULSE BASE START STOP COMPLIANCE a IPULSE...

Page 105: ...ement units are on and all of the units output 0 V In this state you can modify any setting items on the setup screens The following are the conditions of each unit and accessories in idle state SMU 0...

Page 106: ...ined as the standby channel Following settings keep the same conditions as the previous state output switch of each unit output impedance of PGUs switching condition of the 16440A selector resistance...

Page 107: ...ress states to standby state If you perform measurements or force stress from the standby state then the 4155B 4156B returns to the standby state after one of the following conditions occurs Measureme...

Page 108: ...put in the order that you specify in the OUTPUT SEQUENCE table on the MEASURE OUTPUT SEQUENCE screen The source outputs are stopped in the opposite order You can set the output sequence to prevent dam...

Page 109: ...s output 0 V When moving to the measurement stress force or standby state the units operate as shown below 1 Disabled units keep 0 V output and turn the output switch off where disabled unit means the...

Page 110: ...s Output Sequence Example Output sequence in the following conditions is shown in Figure 3 4 Units available SMU1 to SMU 4 VSU1 to VSU2 Units disabled SMU4 and VSU2 Output sequence No change from the...

Page 111: ...of the following 1 SMU1 2 SMU2 3 SMU3 4 SMU4 5 VSU1 6 VSU2 7 PGU1 8 PGU2 Starting Outputs In the idle state output switches of all units are on and the units output 0 V When moving to the measurement...

Page 112: ...put Sequence Example Output sequence in the following conditions is shown in Figure 3 5 Units available SMU1 to SMU 4 VSU1 to VSU2 Units disabled SMU4 and VSU2 Output sequence No change from the defau...

Page 113: ...ctions Trigger Function Trigger Function Trigger function is used to perform measurements synchronized with the measurements or source outputs by external instruments Connection The following figure s...

Page 114: ...elect either TRIG OUT or TRIG IN in the TRIGGER SETUP table on the MEASURE OUTPUT SEQUENCE screen Then the trigger inputs or outputs are performed automatically after you start a measurement by select...

Page 115: ...s examples of externally triggered sampling and sweep measurements For the trigger polarity you can select positive or negative Figure 3 6 Examples of Externally Triggered Measurements After you press...

Page 116: ...rcing starts the trigger signal changes to the active level When stress forcing finishes the trigger signal changes to the non active level To use the gate trigger function set the TRIGGER SETUP field...

Page 117: ...he leading edge So you set the trigger output delay time to wait until the 4155B 4156B outputs a stable pulse peak value Available setting range for the trigger output delay time is Range 0 to specifi...

Page 118: ...n the following figure The step delay time you specify for trigger is the time from when the trigger is output to when the next step occurs This is to make sure the external instrument has enough time...

Page 119: ...t terminal The trigger signal is synchronized with the PGU output pulses and you cannot control trigger timing The polarity of the trigger is positive and the output level is TTL The following figure...

Page 120: ...example you can specify to connect the PGU to the DUT during stress and connect the SMU to the DUT during measurement So when you press the Stress key in the MEASUREMENT key group the PGU is automati...

Page 121: ...SW1 and SW2 are less than for SW3 However the switching speed of SW3 is faster and life is longer than SW1 and SW2 If you need to switch PGU many times use PGU OPEN not OPEN to disconnect PGU Restrict...

Page 122: ...e drop of the series resistance value So the GRAPH LIST screen group show the compensated data For details of the 16441A R Box refer to Agilent 16441A R Box User s Guide Resistance Value The 16441A R...

Page 123: ...s R BOX Control Non Kelvin Connections The following figure shows the 16441A R Box connections using non Kelvin connections Kelvin Connections The following figure shows the 16441A R Box connections u...

Page 124: ...standby channel SMU that is set to COMMON output mode If the 4155B 4156B is on and an emergency occurs the resistance value changes to 1 MW There is a possibility that the 4155B 4156B cannot perform...

Page 125: ...1A R Box Table 3 4 shows switching conditions for each setting Table 3 4 Switching Conditions of the 16441A R Box Resistance is switched before and after measurement state In the standby state the str...

Page 126: ...3 52 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions R BOX Control Figure 3 8 Simplified Circuit Diagram of the 16441A R Box...

Page 127: ...rement Ranging Modes If you choose sweep measurement or sampling measurement initial interval 2 ms and you do not set a ranging mode auto ranging is set for voltage measurement mode channel and limite...

Page 128: ...1 A to 1 mA The unit changes ranges up or down one range at a time until the measurement value is between 10 and 114 of the range then the unit performs the measurement If the measurement value is le...

Page 129: ...he specified range is greater than the lowest range that contains V compliance the measurement is performed at the lowest range that contains V compliance I measurement If specified range is greater t...

Page 130: ...asurement The monitor unit measures at the lowest range that includes V compliance For VMUs compliance range is automatically set as follows grounded mode 20 V differential mode 2 V I measurement The...

Page 131: ...When a unit reaches compliance the unit acts as a constant voltage source or a constant current source The unit keeps the output value when reaching compliance For compliance setting range and resolut...

Page 132: ...is automatically set as follows and you cannot change the setting GNDU 1 6 A HRSMU 105 mA MPSMU 105 mA HPSMU 1 A Table 3 6 V Compliance Setting Range Unit Output Range V Compliance Setting Range HRSM...

Page 133: ...mA I 125 mA 0 to 100 V 1 A 125 mA I 500 mA 0 to 40 V 1 A 500 mA I 1 A 0 to 20 V Unit V Compliance Resolution HRSMU 0 V V 2 V 100 mV MPSMU 2 V V 20 V 1 mV HPSMU 20 V V 40 V 2 mV 40 V V 100 V 5 mV 100...

Page 134: ...Resolution HRSMU 100 fA I 100 pA 10 fA 100 pA I 1 nA 100 fA 1 nA I 10 nA 1 pA 10 nA I 100 nA 10 pA 100 nA I 1 mA 100 pA 1 mA I 10 mA 1 nA 10 mA I 100 mA 10 nA 100 mA I 1 mA 100 nA 1 mA I 10 mA 1 mA 10...

Page 135: ...r compliance for a V sweep source the 4155B 4156B changes the I compliance at every voltage step The I compliance is set to the smaller value of I compliance and Icomp value below See Figure 3 10 a Ic...

Page 136: ...V compliance range during a V or I sweep Figure 3 11 shows an example of the difference in SMU output when power compliance is set and when power compliance is not set Figure 3 11 Allowable I Output w...

Page 137: ...measurement units use the same integration time setting To perform high speed measurements set integration time to short To perform more accurate measurements set integration time to long Integration...

Page 138: ...cally changed as follows Long Long integration time is effective when you need high resolution and noise reduction measurement But the measurement speed is slow Setting Press Long front panel key Inte...

Page 139: ...RE SAMPLING SETUP screen If you set initial interval to a short time and if filter is set to ON be aware that settling time takes several ms stress force You set the FILTER field on the STRESS STRESS...

Page 140: ...s order The ZERO CANCEL field is automatically set to ON and offset data is measured This data is used for the offset cancel Allowable offset value is shown in Table 3 11 If offset data is too large o...

Page 141: ...r fixed 10 pA 100 pA limited or fixed 100 pA 1 nA limited or fixed 1 nA Differential Voltage Measurement VMU auto limited auto fixed 0 2 V b b VMU2 measures voltage in grounded mode to confirm that vo...

Page 142: ...ZERO CANCEL table 3 Press Single Repeat or Append front panel key to execute measurement The offset cancel is automatically performed while measurement is performed The measurement data is automatica...

Page 143: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 Making a Measurement...

Page 144: ...tress force and consists of the following sections Connecting DUT Sweep Measurements Knob Sweep Measurements Sampling Measurements Stress Force For details about entry fields on the 4155B 4156B setup...

Page 145: ...connecting the test fixture or the connector plate to the 4155B 4156B see User s Guide General Information If you use a wafer prober see wafer prober manuals Note that you must set the 4155B 4156B to...

Page 146: ...se the lid of the test fixture To force more than 40 V close the lid of the test fixture Otherwise the interlock function will stop the 4155B 4156B output To connect between the socket module and the...

Page 147: ...s and contacts For example you can use the following connections as Kelvin connections on the test fixture The Kelvin connection is available for the 4156B s HRSMU and 41501A B s HPSMU Examples Kelvin...

Page 148: ...w 1 At end of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial cent...

Page 149: ...ise Guarding Guarding reduces the leakage current between the measurement points and instrument This is important when you measure low current The following figure shows the theory of guarding The buf...

Page 150: ...es 1 At end of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial cen...

Page 151: ...e of the voltmeter is very high so the voltage drop of resistances rS1 and rS2 can be ignored The Kelvin connection is effective even when forcing voltage The voltage drop due to the residual resistan...

Page 152: ...Connecting DUT on page 4 3 for procedures 2 Defining measurement mode and measurement units that you use to make measurement The following tasks are described To Define Measurement Units To Define a...

Page 153: ...show measurement results The following tasks are described To Display Graphics Results To Display List Results 5 Executing the measurement The following tasks are described To Use Standby Function To...

Page 154: ...le For example enter Ic for collector current If channel does neither I force nor I measurement you can omit INAME 4 MODE Select one of the following softkeys to set the output mode V Voltage output f...

Page 155: ...phabet character To disable a unit Select DELETE ROW softkey The settings for the unit are deleted Example The following settings show an example for measuring an n p n transistor s I V characteristic...

Page 156: ...EAR linear step mode LOG XX logarithmic step mode XX specifies the number of steps per decade XX is 10 25 or 50 3 VAR1 START Enter the sweep start value 4 VAR1 STOP Enter the sweep stop value If you s...

Page 157: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 15 Making a Measurement Sweep Measurements Example The following example shows the primary sweep conditions VAR1 parameters...

Page 158: ...lue 2 VAR2 STEP Enter the secondary sweep step value 3 VAR2 NO OF STEP Enter the number of steps for the secondary sweep 4 VAR2 COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and...

Page 159: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 17 Making a Measurement Sweep Measurements Example The following example shows the secondary sweep conditions VAR2 parameters...

Page 160: ...culated by the following equation VAR1 VAR1 RATIO OFFSET On the MEASURE SWEEP SETUP screen set up the primary sweep source VAR1 then do following 1 VAR1 OFFSET Enter the offset value of the VAR1 outpu...

Page 161: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 19 Making a Measurement Sweep Measurements Example The following example shows the synchronous sweep conditions VAR1 parameters...

Page 162: ...tant output source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 CONSTANT SOURCE Enter the desired output value of the constant source 2 CONSTANT COMPLIANCE Only for SMU Ent...

Page 163: ...ource press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 Set the source output parameters For VAR1 refer to To Set up Primary Sweep on page 4 14 For VAR2 refer to To Set up Secon...

Page 164: ...hown in the following figures SMU outputs the pulses as shown in figure a or figure b Figure a When the function FCTN is set to VAR1 VAR2 or VAR1 The pulse peak values are the sweep output values calc...

Page 165: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 23 Making a Measurement Sweep Measurements Example The following shows an example setup of SMU pulsed output on the MEASURE SWEEP SETUP screen...

Page 166: ...ALUE field of desired PGU column enter pulse base value 9 In the LEADING TIME field of desired PGU column enter the leading edge transition time 10 In the TRAILING TIME field of desired PGU column ent...

Page 167: ...en Using PGUs as constant voltage source To use a PGU as a constant voltage source set the desired PGU as follows V in MODE column on the CHANNEL DEFINITION screen Desired output voltage value in SOUR...

Page 168: ...the following output value during the Standby state that is before and after measurements or stress For sampling measurements only the CONSTANT function is available From Standby state you can execute...

Page 169: ...e 6 or less alphanumeric characters First character must be alphabet character Name must be unique Name is case sensitive For example HFE is different from Hfe In the user function definition you can...

Page 170: ...2 axis column When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are...

Page 171: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 29 Making a Measurement Sweep Measurements Example The following figure shows an example to set up both Y1 and Y2 axes and to set grid to ON...

Page 172: ...which you want to list the measurement results When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondar...

Page 173: ...key Self calibration is performed automatically every 30 minutes Be aware that measurement cannot be performed while calibration is executed To Use Offset Cancel Function 1 Press Meas key in the PAGE...

Page 174: ...key group Single Repeat and Append Measurement There are three measurement execution modes as follows Single measurement Clears GRAPHICS or LIST screen then executes measurement one time Measurement...

Page 175: ...0 W resistance 10k ohm secondary softkey to connect 10 kW resistance 100k ohm secondary softkey to connect 100 kW resistance 1M ohm secondary softkey to connect 1 MW resistance Resistance is switched...

Page 176: ...resistance characteristics The 16441A R Box allows SMUs to measure current controlled negative resistance 1 MW characteristics Connect the resistance of the 16441A as shown in following figure Exampl...

Page 177: ...Sweep Measurements This section covers the following tasks about knob sweep measurements The knob sweep function is useful in the following cases to determine a parameter value for normal sweep to qui...

Page 178: ...t starts During measurements self test or forcing stress this operation is ignored If you want to change the Y axis parameter press Stop front panel key and Y AXIS ASSIGN primary softkey Then select a...

Page 179: ...ndary softkeys are available SWEEP MODE Sets sweep mode to SINGLE or DOUBLE POLARITY Sets polarity of VAR1 output to POS NEG or BIPOLAR VAR1 RANGE Sets VAR1 sweep range This sets X axis scale NO OF ST...

Page 180: ...o know the incorrect setting The setting is highlighted on the screen Select CONT softkey to perform knob sweep measurement with the following settings If VAR1 function FCTN has been set The unit work...

Page 181: ...B 4156B operation state to the previous state For example if the knob sweep measurement starts from the idle state the operation state returns to the idle state Starting knob sweep again To start the...

Page 182: ...n page 4 3 for procedures 2 Defining measurement mode and measurement units that you use to make measurement The following tasks are described To Define Sampling Measurement Units To Define a User Fun...

Page 183: ...surement Results see previous section To Set up List Display of Measurement Results see previous section 5 Executing the measurement The following tasks are described To Output Same Value Before and A...

Page 184: ...u can omit INAME 6 In the MODE column select V secondary softkey for voltage output mode SMU VSU and PGU and grounded voltage measurement mode of VMU I secondary softkey for current output mode SMU VP...

Page 185: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 43 Making a Measurement Sampling Measurements Example The following figure shows an example setup to define sampling measurement units...

Page 186: ...recent samples For details about sampling mode see Sampling Measurement Mode in Chapter 2 5 In the INITIAL INTERVAL field enter a value for the first sampling interval 6 In the NO OF SAMPLES field en...

Page 187: ...ampling Measurements The following figure shows the relation between the sampling parameters and sampling measurement You can set a hold time by entering a number units seconds in the HOLD TIME field...

Page 188: ...TUP primary softkey 4 In the SOURCE field of the desired unit in the CONSTANT area enter the desired output value To modify the UNIT NAME and MODE field Modify the UNIT NAME and MODE fields on the CHA...

Page 189: ...us step 6 In EVENT field of STOP CONDITION area select Val Th secondary softkey to stop the sampling when the sampled value is greater than the threshold value Val Th secondary softkey to stop the sam...

Page 190: ...4 48 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sampling Measurements Example The following figure shows an example setup of stop condition...

Page 191: ...he tasks for stress forcing Two types of stress can be forced by the 4155B 4156B dc stress Dc voltage stress can be forced from SMUs VSUs or PGUs Dc current stress can be forced from SMUs ac stress al...

Page 192: ...ess units and constant output units The following tasks are described To Set up Stress Source Channels on page 4 51 To Use Selector on page 4 60 3 Setting the stress forcing parameters and constant ou...

Page 193: ...ess channel name is only used for reference on the STRESS SETUP screen not on any results screen So you can omit the name if desired In the FCTN column you can set up to four units to SYNC At least on...

Page 194: ...4 52 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force Example The following figure shows an example setup to set two PGUs to ac stress source...

Page 195: ...tatus occurs STOP AT ANY ABNORM secondary softkey to stop forcing the stress when any abnormal status occurs STOP AT COMPLIANCE secondary softkey to stop forcing the stress only when SMU reaches its c...

Page 196: ...e see Stress Force Sequence in Chapter 3 Setting the Accumulated Stress Time The ACCUMULATED STRESS field shows the total stress that has been forced If necessary you can change the value in this fiel...

Page 197: ...See Delay time on page 4 56 6 In the PEAK VALUE field enter the pulse peak value 7 In the BASE VALUE field enter the pulse base value 8 In LEADING TIME field enter the leading edge transition time of...

Page 198: ...ent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force Delay time The following figure shows the meaning of delay time Example The following figure shows an example to set up a...

Page 199: ...the CONSTANT area enter the desired dc stress value 4 In the COMPLIANCE field in the CONSTANT area enter the compliance value The non stress NSYNC constant units also appear in the CONSTANT area You c...

Page 200: ...ftkey then enter desired value The CHANGE DURATON secondary softkey is displayed only if the DURATION mode is selected on the STRESS STRESS SETUP screen To change pulse count pulse count mode Select C...

Page 201: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 59 Making a Measurement Stress Force Example The following figure shows an example of STRESS STRESS FORCE screen...

Page 202: ...rement state OPEN secondary softkey to disconnect SMU PGU and DUT during measurement state PGU OPEN secondary softkey to disconnect PGU from DUT by semiconductor switch during measurement state 4 In t...

Page 203: ...nerator Selector The selector has two types of switches relay switch and semiconductor switch Normally the relay switch has three states SMU is connected to DUT PGU is connected to DUT and neither is...

Page 204: ...4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force Example Following shows an example setup that connects two SMUs to DUT during measurement state and connects two PGUs to DUT during...

Page 205: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 Analyzing Measurement Results...

Page 206: ...utomatic analysis function you set up the DISPLAY ANALYSIS SETUP screen before starting measurements Then after the measurements are performed the lines and markers are positioned automatically accord...

Page 207: ...on on page 5 10 Line To Draw Line through Two Specified Points on page 5 10 To Draw Line through Specified Point with Specified Gradient on page 5 12 To Draw Tangent to Specified Point of Measurement...

Page 208: ...ker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and third fields are X Y1 and Y2 coordinates respectively X and Y1 indic...

Page 209: ...4156B User s Guide Vol 2 Edition 5 5 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to desired measurement point and to set the Y1 axis ma...

Page 210: ...ed on measurement curve of Y1 axis and an asterisk marker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and third fields a...

Page 211: ...6B User s Guide Vol 2 Edition 5 5 7 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to points between measurement points by setting INTERPOLA...

Page 212: ...NG OFF 3 Move the cursor by using arrow keys of the MARKER CURSOR key group The CURSOR coordinate fields indicate the location of cursor The first second and third fields are X Y1 and Y2 coordinates r...

Page 213: ...ftkey To Zoom the Display Range 1 Position the cursor at the center of area that you want to zoom For details about displaying and moving cursor see To Display or Move Cursor on page 5 8 2 Select SCAL...

Page 214: ...condary softkey To Draw Line through Two Specified Points 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to O...

Page 215: ...then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To...

Page 216: ...n highlighted and not highlighted 5 Move the cursor to desired location by using arrow keys of the MARKER CURSOR key group 6 Select GRAD VALUE secondary softkey then enter gradient value The line goes...

Page 217: ...ent 4155B 4156B User s Guide Vol 2 Edition 5 5 13 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a line through specified point with specified grad...

Page 218: ...esired measurement point by rotating rotary knob When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradients of sel...

Page 219: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 15 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a tangent to a specified measurement point...

Page 220: ...or 2 Selecting this softkey toggles the setting 5 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF ON OFF 6 Select REGRESS...

Page 221: ...of selected line are also displayed in the plotting area To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn...

Page 222: ...OFF Set LINE SELECT secondary softkey to desired line 1 or 2 Selected line is highlighted To select line to analyze Selecting LINE SELECT secondary softkey toggles as follows 1 2 NONE 1 The following...

Page 223: ...GRAPH secondary softkey 3 Move the pointer to desired data variable field by using the arrow keys then select secondary softkey to enter the desired variable name 4 Select EXIT primary softkey to exit...

Page 224: ...secondary softkey 3 Move pointer to maximum or minimum value field of X or Y axis scale by using the arrow keys then edit the setup value by using ENTRY keys or rotary knob 4 Select EXIT primary softk...

Page 225: ...RAPH secondary softkey 3 Move pointer to variable field of X Y1 or Y2 axis by using arrow keys then select secondary softkey to set the desired variable 4 Select EXIT primary softkey to exit RE SETUP...

Page 226: ...ve is overlaid onto plotting area Selecting OVERLAY PLANE secondary softkey toggles as follows OFF 1 2 3 4 OFF To display information of overlay measurement curve Select SHOW OVERLAY INFO secondary so...

Page 227: ...de Vol 2 Edition 5 5 23 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to overlay a measurement curve that is stored in internal memory 1 onto the presentl...

Page 228: ...an arrow key of the MARKER CURSOR key group List scrolls in direction of selected arrow List can be scrolled even while performing measurements When marker is displayed marker does not move during scr...

Page 229: ...ry knob to move the marker to desired measurement point To turn off marker Set MARKER secondary softkey to OFF To move marker to next VAR2 step Select MARKER SKIP secondary softkey Marker moves to nex...

Page 230: ...primary softkey 2 Move pointer to desired column variable or data variable field by using arrow keys then select secondary softkey of desired variable 3 Select EXIT primary softkey to exit RE SETUP LI...

Page 231: ...g of the Automatic Analysis Function You set up automatic analysis on the DISPLAY ANALYSIS SETUP screen Automatic analysis function is executed after a measurement is executed by Single or Append fron...

Page 232: ...to specify a point by data condition mode Go to step 7 7 If you selected BY X Y COORDINATE secondary softkey a In the X field enter desired expression to specify X coordinate b In the Y field enter de...

Page 233: ...ng of expression that you can enter in step 6 or 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the poin...

Page 234: ...oftkey to specify a point by data condition mode Go to step 7 7 If you selected BY X Y COORDINATE secondary softkey a In the X field enter desired expression to specify X coordinate b In the Y field e...

Page 235: ...urement point is used For the meaning of expression that you can enter in step 6 or 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disab...

Page 236: ...field 5 select AFTER secondary softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings 9 If you selected AFTER se...

Page 237: ...B 4156B User s Guide Vol 2 Edition 5 5 33 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a tangent line to a specified measu...

Page 238: ...softkey to specify a point by data condition mode Go to step 7 7 If you selected BY X Y COORDINATE secondary softkey a In the X field enter desired expression to specify X coordinate b In the Y field...

Page 239: ...e specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in...

Page 240: ...lts Automatic Analysis Example The following figure shows an example setup to automatically draw a regression line The range for the regression calculation is specified by two points One point is spec...

Page 241: ...ry softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings 6 If you selected AFTER in field 4 select secondary sof...

Page 242: ...8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically display marker at specified poi...

Page 243: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 Screen Organization...

Page 244: ...using the front panel controls The 4155B 4156B is operated by setup screens and results screen displayed on the screen The following sections explain these setup screen structure Screen Structure CHAN...

Page 245: ...s Guide Vol 2 Edition 5 6 3 Screen Organization Screen Structure Screen Structure The 4155B 4156B has seven screen groups that have a total 22 setup screens as shown in Figure 6 1 Figure 6 1 Screen S...

Page 246: ...EP screen group Displays the measurement results when the knob sweep function is used You can use the front panel keys in the PAGE CONTROL key group to display the desired screen The PAGE CONTROL key...

Page 247: ...efinition For defining the user functions User Variable Definition For defining the user variables To move to the CHANNELS screen group press Chan front panel key The following primary softkeys appear...

Page 248: ...comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups MEASUREMENT MODE MEASUREMENT MODE field sets measurement mode to sweep measurement mo...

Page 249: ...IC measurement setup data for bipolar transistor Vce Ic characteristics MEM2 M FET VDS ID measurement setup data for FET field effect transistor Vds Id characteristics MEM3 M FET VGS ID measurement s...

Page 250: ...he unit Unit is disabled Restrictions VNAME must be 6 or less alphanumeric characters First character must be alphabet character Name must be different from other names NOTE Switching units To switch...

Page 251: ...ferent from other names MODE You define an output mode for SMUs VSUs PGUs and GNDU and measurement mode for VMUs When the pointer is located in this column allowable modes appear in the secondary soft...

Page 252: ...also If VAR2 is set you must set VAR1 also The output modes of VAR1 and VAR1 must be same That is the MODE setting for both must be set to a voltage mode or both must be set to a current mode For exa...

Page 253: ...in the secondary softkey area You select the desired series resistance Normally SMU1 and SMU2 have SERIES RESISTANCE fields However if the SMU and Pulse Generator Expander is installed and if the expa...

Page 254: ...ld defines the user function name In this field you can enter a name by using the keyboard or front panel keys Or you can select variables that are shown on the secondary softkeys To delete a user fun...

Page 255: ...ROW softkey to delete the NAME UNIT and DEFINITION entries DEFINITION You enter an expression that defines the user function The expression can consist of numerical operators constants variables buil...

Page 256: ...is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups NAME NAME field defines the user variable name You can enter a name by using the keyboard or front panel keys To delete a...

Page 257: ...keys To delete a user variable select DELETE ROW softkey to delete the NAME UNIT and SIZE entries Restriction UNIT must be 6 or less alphanumeric characters SIZE SIZE field sets the number of data for...

Page 258: ...ting the measurement range integration time zero cancel and wait time Output Sequence For setting the output sequence and triggering To move into the MEASURE screen group press Meas front panel key Th...

Page 259: ...nt which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups VAR1 parameters In this column you set up output parameters for primary sweep unit UNIT and NAME are defined on...

Page 260: ...y 0 zero for the start or stop value the minimum output value for the unit is used You specify the number of steps per decade in the LIN LOG field NO OF STEP For the linear sweep mode the number of st...

Page 261: ...for SMUs To disable power compliance function select OFF secondary softkey VAR1 parameters In this column you set up the output parameters for the synchronous sweep unit This VAR1 table is displayed...

Page 262: ...SWEEP Status Select CONT AT ANY secondary softkey sweep will continue even if an abnormal status occurs Abnormal status means the following SMU reaches its compliance setting Current of VSU exceeds ap...

Page 263: ...urement range differs from compliance range lowest range that includes compliance Ranging mode is set to auto range or limited auto range Multi channel measurement is set CONSTANT These parameters set...

Page 264: ...desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups SAMPLING PARAMETER MODE MODE field sets the sampling mode In this field select LINEAR secondary sof...

Page 265: ...ld sets the total sampling time The total sampling time must satisfy the following condition total sampling time initial interval number of samples 1 In this field enter a value or select NO LIMIT sec...

Page 266: ...interval time NAME NAME field sets the variable name or user function name that you want to monitor for the stop conditions Allowable variable names and user function names are shown in the secondary...

Page 267: ...ecify the output value COMPLIANCE In the COMPLIANCE field you specify the compliance value If a VSU is used for the constant output unit this field cannot be set compliance value is fixed to 100 mA If...

Page 268: ...you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups PULSE You set the pulse output parameters in the PULSE area U...

Page 269: ...PEAK VALUE and BASE VALUE fields specify the pulse peak and pulse base values LEADING TIME and TRAILING TIME LEADING TIME and TRAILING TIME fields specify the transition time of leading and trailing e...

Page 270: ...nly FREE RUN is available Enter a pulse count value only for sampling measurements Select FREE RUN or enter 0 zero to set continuous pulse output If either PGU1 PGU2 or both are set to standby ON on t...

Page 271: ...ASURE MEASURE SETUP screen On the MEASURE MEASURE SETUP screen you set measurement range zero cancel integration time and wait time User Comment In this field you can enter a desired comment The comme...

Page 272: ...et auto ranging mode FIXED secondary softkey to set fixed ranging mode LIMITED AUTO secondary softkey to set limited auto ranging mode The right field of RANGE specifies the range value For auto rangi...

Page 273: ...the medium mode which is calculated from the power line frequency and NPLC value NPLC value is always 1 You cannot change it LONG The TIME field for LONG shows the integration time of the long mode wh...

Page 274: ...in Chapter 3 User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups OUTPUT SEQUENCE In the UNIT column allowab...

Page 275: ...riggering function FUNCTION FUNCTION field sets the triggering mode Select TRIG OUT secondary softkey to enable the following functions For a normal non pulse sweep measurement the 4155B 4156B outputs...

Page 276: ...igger output delay time specifies how much to delay the trigger after the leading edge For details about trigger output delay time refer to Triggering an External Instrument in Chapter 3 When you set...

Page 277: ...defining where to automatically display lines and marker after a measurement To move into the DISPLAY screen group do one of the following Press Display front panel key in the PAGE CONTROL key group S...

Page 278: ...ined by the axis names and data variables that you set on this screen User Comment In this field you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DI...

Page 279: ...these values if desired GRID In the GRID field you can specify whether to display the grid on the plotting area by selecting ON or OFF secondary softkey LINE PARAMETER In the LINE PARAMETER field you...

Page 280: ...omment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups DISPLAY MODE This field specifies display mode If present mode is graphics mode select LIST softkey to chang...

Page 281: ...IST screen The numerical values of these variables will be shown on the LIST screen according to the marker position In this field you can select the desired variable names in the secondary softkey ar...

Page 282: ...he MARKER field you set up the marker For the automatic analysis function and the manual analysis function four line modes can be used Normal mode drawing a line between any two points Grad mode drawi...

Page 283: ...Y fields Select BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to specify a measurement point LINE1 NORMAL LINE ON Y1 between a point AT X 0 Y 0 and a poi...

Page 284: ...ct BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to specify a measurement point LINE1 GRAD LINE ON Y1 between a point WHERE DGM MAX DGM 0 01 Gradient In...

Page 285: ...y the measurement point for which you want to draw a tangent line LINE1 TANGENT LINE ON Y1 between a point where DGM MAX DGM 0 01 In addition you can specify another condition if you position the poin...

Page 286: ...played Then you enter the desired X Y coordinate values or expressions in the X and Y fields Select BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to spec...

Page 287: ...ndition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that...

Page 288: ...rformed If the present screen is the GRAPHICS or LIST screen you can toggle between these screens by pressing the Graph List front panel key On the GRAPHICS result screen In the primary softkey area o...

Page 289: ...In these fields the coordinate values of the cursor and marker locations are displayed If cursor or marker is not displayed these fields are blank The three fields are for X Y1 and Y2 coordinate valu...

Page 290: ...If on marker is displayed in the plotting area If off marker is not displayed For Y1 axis marker is a circle o For Y2 axis marker is an asterisk Active marker is highlighted for the axis that is selec...

Page 291: ...rsor function The marker can move on the measurement curve only so changing the X value automatically changes the Y value and vice versa If the interpolation mode is off the marker moves to the measur...

Page 292: ...is greater or less than maximum or minimum scale value cursor moves to the maximum or minimum axis point MARKER SKIP softkey Select MARKER SKIP secondary softkey to move the marker to the next measure...

Page 293: ...t changed by auto analysis function LINE softkey Select LINE secondary softkey to toggle the line mode between OFF and ON You can set line on off for line 1 and line 2 independently OFF Line selected...

Page 294: ...key is displayed When line mode is regression mode selecting REGRESS MODE softkey changes to normal mode SELECT CURSOR softkey Select SELECT CURSOR secondary softkey to exchange the active and non act...

Page 295: ...cursor appears at the center then zoom is performed ZOOM OUT softkey Select ZOOM OUT secondary softkey to change the X and Y scaling to double the present scaling This reduces measurement curve on the...

Page 296: ...ary softkey area You can select secondary softkey to change the variable name for each axis Measurement units change automatically according to variable you select When the pointer is located in the m...

Page 297: ...ing area OVERLAY PLANE softkey Select OVERLAY PLANE to control which internal memory measurement curve is overlaid This softkey toggles the internal memory number as follows OFF 1 2 3 4 OFF SHOW OVERL...

Page 298: ...nge the value VAR1 STEP softkey Select VAR1 STEP secondary softkey to change the step value of the primary sweep VAR1 The present step value is shown on this softkey and in the data entry area Then yo...

Page 299: ...Select COMP secondary softkey to change the compliance and power compliance values of the secondary sweep VAR2 The present V or I compliance value is shown on the middle line of this softkey and the p...

Page 300: ...the sweep measurement The present delay time is shown on this softkey and in the data entry area Then you can change the value You can change the delay time while measurement is being performed This s...

Page 301: ...ITIAL INTRVAL secondary softkey to change the initial interval time for sampling measurements The present initial interval time is shown on this softkey and in the data entry area You can change the v...

Page 302: ...econdary softkey to change the enable delay time for the stop condition The present enable delay time is shown on this softkey and in the data entry area Then you can change the value THRESHOLD softke...

Page 303: ...t output value and compliance also appears For example when a output source named Vce is defined 5 0 V output with 100 mA compliance the following softkey appears Vce 5 00 V 100 mA Select the secondar...

Page 304: ...ep start stop and step values of VAR1 primary sweep and VAR2 secondary sweep if VAR2 sweep is selected List Index Number This column displays index number of each measurement point Index number is ass...

Page 305: ...hows only four columns for the data If you have defined more than four variable values you can scroll right or left by using the left arrow or right arrow front panel key Data Variable Display This ar...

Page 306: ...again DIRECT MARKER softkey Select DIRECT MARKER secondary softkey to move the marker to the specified value directly When you select this softkey a cell marker is displayed in the row of the marker a...

Page 307: ...ey Select SEARCH MORE secondary softkey to move marker to next candidate that satisfies specified value If consecutive values also satisfy specified value the next search starts after the consecutive...

Page 308: ...kette or network disk You can select a file name from the list ASCII SAVE function automatically adds TXT extension to specified file name NAME Enter the name of file without extension to which you wa...

Page 309: ...E SETUP softkey Select RE SETUP primary softkey to change the user comments variable name for each column and displayed data variables After you select this softkey a pointer highlight appears on the...

Page 310: ...top value of the primary sweep VAR1 The present stop value is shown on this softkey and in the data entry area Then you can change the value VAR1 STEP softkey Select VAR1 STEP secondary softkey to cha...

Page 311: ...shown on this softkey and in the data entry area Then you can change the value COMP softkey displayed only if VAR2 is defined Select COMP secondary softkey to change the compliance and power complian...

Page 312: ...he sweep measurement The present delay time is shown on this softkey and in the data entry area Then you can change the value You can change the delay time while measurement is being performed This so...

Page 313: ...r sampling measurements The present initial interval time is shown on this softkey and in the data entry area Then you can change the value NO OF SAMPLES softkey Select NO OF SAMPLES secondary softkey...

Page 314: ...condition The present enable delay time is shown on this softkey and in the data entry area Then you can change the value THRESHOLD softkey Select THRESHOLD secondary softkey to change threshold value...

Page 315: ...t output value and compliance also appears For example when a output source named Vce is defined 5 0 V output with 100 mA compliance the following softkey appears Vce 5 00 V 100 mA Select the secondar...

Page 316: ...orcing To move into the STRESS screen group do the following Press Stress front panel key in the PAGE CONTROL key group Then the following softkeys appear in the primary softkey area CHANNEL STRESS ST...

Page 317: ...d on the other STRESS screens CHANNELS CHANNELS table defines the mode name and function for the stress state UNIT This column lists all the source units that are installed in the 4155B 4156B NAME of...

Page 318: ...switch the STRESS MODE NAME and FCTN assignments for two units do as follows 1 Position pointer in top field of STRESS MODE column CHANNEL ASSIGN softkey appears 2 Select CHANNEL ASSIGN Pointer moves...

Page 319: ...force channels In this field select SYNC secondary softkey to set channel to stress force channel NSYNC secondary softkey to set channel to non stress force channel The output timing is different for...

Page 320: ...using semiconductor switch The normal relay switch for PGU stays closed This is used to prevent the normal relay switch from being damaged Semiconductor switch has longer life than normal relay switc...

Page 321: ...nts and when the stress mode is duration mode you specify the stress duration in seconds For details of stress mode refer to Stress Mode in Chapter 3 In the first field select DURATION secondary softk...

Page 322: ...tress at the same time For details about hold time see example figure in Stress Force Sequence in Chapter 3 FILTER FILTER field specifies SMU filter to ON or OFF If this field is set to ON overshoot d...

Page 323: ...NIT and NAME are defined on STRESS CHANNEL DEFINITION screen On the STRESS CHANNEL DEFINITION screen you set the PGUs as follows ac stress MODE VPULSE FCTN SYNC ac non stress MODE VPULSE FCTN NSYNC dc...

Page 324: ...ON screen you set the SMUs and VSUs as follows dc stress MODE I SMUs only or V FCTN SYNC dc non stress MODE I SMUs only or V FCTN NSYNC CONSTANT table is for setting the output parameters of SMUs VSUs...

Page 325: ...CE screen you can monitor the stress status User Comment In this field you can enter a desired comment The comment you enter here is also displayed on the other STRESS screens Select CHANGE COMMENT se...

Page 326: ...You change the value as follows Enter number by using numeric and edit keys Change number by rotating rotary knob STATUS In the STATUS field the time that stress has been forced is displayed in second...

Page 327: ...parameters For example to use SMU2 as a current source you move the pointer to MODE field of SMU2 then select I secondary softkey as follows Data Input or Edit When you move the pointer to a field on...

Page 328: ...in a comment or name field you input the desired characters by using the ENTRY front panel key group You press the desired characters The characters appear in the data entry area For name fields you...

Page 329: ...u can enter lowercase alphabet characters To change between these states toggle between the non shift shift state by pressing the blue key toggle between the upper lowercase shift state by pressing th...

Page 330: ...mode has special functions for entering data as shown in the following table The front panel green key can also be used to perform dump Plot Print key knob sweep Single key and zero offset cancel Stop...

Page 331: ...eft by one column in the data entry area Moves the cursor right by one column in the data entry area Delete Deletes one character where the cursor is located Insert Toggles the input mode in the data...

Page 332: ...following status TRG The 4155B 4156B is waiting for trigger input from an external instrument DRW The 4155B 4156B is drawing a measurement curve ANA The 4155B 4156B is performing auto analysis or regr...

Page 333: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 Data Variable and Analysis Function...

Page 334: ...User s Guide Vol 2 Edition 5 Data Variable and Analysis Function This chapter explains the display and analysis functions of Agilent 4155B 4156B Data Variable Expression Built in Function Read Out Fun...

Page 335: ...put data that you set for SMU or VSU Measurement data of SMU or VMU Output data that you set for PGU Time data of sampling measurement Index of measurement result data Output data of SMU or VSU The da...

Page 336: ...VNAME for PGU that you defined on CHANNELS CHANNEL DEFINITION screen is the data variable name for pulse peak voltage pulse period PGT is the data variable for pulse period pulse duration PGD is the...

Page 337: ...eric value To define a user function you define a name and an expression on the CHANNELS USER FUNCTION DEFINITION screen If desired you can define a unit such as ms User function name must start with...

Page 338: ...ables of different length If you perform calculation between user variables or between a user variable and a measurement data variable and the number of data are different the extra data in the longer...

Page 339: ...rs Refer to the following figure The name must be unique Name is case sensitive For example Gm is different from GM NOTE Using Built in Function Name as Data Variable Name You can give a data variable...

Page 340: ...n contains data variables that are related to measurement points the calculated value corresponds to the marker position NOTE Operation between data variables Operation between data variables is perfo...

Page 341: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 9 Data Variable and Analysis Function Expression Figure 7 1 Expression Syntax Figure 7 2 Numeric Constant...

Page 342: ...ion Refer to Figure 7 2 Mantissa decimal part of greater than seven digits is truncated to seven digits f 10 15 p 10 12 n 10 9 m 10 6 u 10 6 m 10 3 k 103 M 106 G 109 scientific constant The following...

Page 343: ...tions for the following In the expression that is used to define a user function on the CHANNELS USER FUNCTION DEFINITION screen As the condition for an automatic analysis function on the DISPLAY ANAL...

Page 344: ...pecified by the 2nd expression Syntax AT 1st expression 2nd expression If 2nd expression is not integer linear interpolated value of 1st expression will be returned Example To return difference of Id...

Page 345: ...rns 3rd expression If 1st expression 2nd expression returns 4th expression Syntax COND 1st expression 2nd expression 3rd expression 4th expression If value of 1st expression or a 2nd expression is inv...

Page 346: ...here dn difference for measurement index number n an value of an expression for measurement index number n N number of sweep steps or number of samples For each primary sweep use same definition as fo...

Page 347: ...1 xn 1 when 1 n N y n yN yN 1 xN xN 1 when n N Where y n differential coefficient for measurement index number n yn value of 1st expression for measurement index number n xn value of 2nd expression f...

Page 348: ...ws when n 1 sn 0 when n 1 sn is presented by the following equation Where sn integral of 1st expression for measurement index number n ri value of 1st expression for measurement index number i xi valu...

Page 349: ...us of Arithmetic error negative value logarithm of absolute value is returned with status of Arithmetic error Example To return the logarithm of ID LGT ID LOG Returns the logarithm base e of expressio...

Page 350: ...e xn moving average of the 1st expression for measurement index number n xi value of the 1st expression for measurement index number i r value of the 2nd expression N number of sweep steps or number o...

Page 351: ...lues in expression invalid values are ignored Example To return the maximum value of ID MAX ID MIN Returns the minimum sweep or sampling value Syntax MIN expression For subordinate sweep measurement t...

Page 352: ...re available The following are restrictions for using read out functions GRAPHICS must be selected in the DISPLAY MODE field on the DISPLAY DISPLAY SETUP screen when you use the read out function If n...

Page 353: ...e active cursor position Syntax CX CY Returns the value of Y coordinate at the active cursor position Syntax CY If there are Y1 and Y2 axes this function returns the value for selected axis CY1 Return...

Page 354: ...If LINE1 is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY Returns the value of Y coordinate at the cross point of LINE1 and LINE2 Syntax IY If there are Y1 a...

Page 355: ...tercept of LINEn an Slope of LINEn If LINE1 is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY2 Returns the value of Y2 coordinate at the cross point of LINE1...

Page 356: ...ction returns the value for selected axis This function calculates the slope by using the following formula If X and Y axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y...

Page 357: ...and Y1 axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y1 axis is linear scaling a y1 y0 log x1 log x0 If X axis is linear scaling and Y1 axis is logarithmic scaling a...

Page 358: ...and Y2 axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y2 axis is linear scaling a y1 y0 log x1 log x0 If X axis is linear scaling and Y2 axis is logarithmic scaling a...

Page 359: ...2 axes this function returns the value for selected axis If LINE1 is vertical this function returns invalid data L1Y1 Returns the Y1 intercept value X 0 of LINE1 Syntax L1Y1 If LINE1 is vertical this...

Page 360: ...y using the following formula If X and Y axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y axis is linear scaling a y1 y0 log x1 log x0 If X axis is linear scaling and...

Page 361: ...and Y1 axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y1 axis is linear scaling a y1 y0 log x1 log x0 If X axis is linear scaling and Y1 axis is logarithmic scaling a...

Page 362: ...and Y2 axes are both linear scaling a y1 y0 x1 x0 If X axis is logarithmic scaling and Y2 axis is linear scaling a y1 y0 log x1 log x0 If X axis is linear scaling and Y2 axis is logarithmic scaling a...

Page 363: ...tical this function returns invalid data L2Y1 Returns the Y1 intercept value X 0 of LINE2 Syntax L2Y1 If LINE2 is vertical this function returns invalid data L2Y2 Returns the Y2 intercept value X 0 of...

Page 364: ...nate at the marker location Syntax MX MY Returns the value of the Y coordinate at the marker location Syntax MY If there are Y1 and Y2 axes this function returns the value for selected axis MY1 Return...

Page 365: ...Analysis Function Analysis Function The 4155B 4156B provides the following functions for analyzing measurement results Marker on the GRAPH LIST GRAPHICS screen Marker on the GRAPH LIST LIST screen Cu...

Page 366: ...secondary softkey The marker for Y1 axis is a circle o and the marker for Y2 axis is an asterisk The active marker depends on the selected axis Markers have the following functions on the GRAPH LIST G...

Page 367: ...oint determined by the expression after auto analysis is performed Moving the marker Basically you can move the markers on measurement points of the measurement curve by using the knob on the front pa...

Page 368: ...displaying values of data variables The data variable values are displayed for the highlighted row specifying the position for direct keyboard calculation If you enter an expression that has data vari...

Page 369: ...ey In addition to the basic movement the following functions allow you to quickly move the marker to the desired position For these functions the row marker becomes a one cell pointer so these functio...

Page 370: ...scaling functions on the GRAPH LIST GRAPHICS screen Refer to Line Drawing on page 7 39 and Scaling Functions on page 7 41 You can select a short cursor which is a cross or a long cursor which is a cro...

Page 371: ...alysis Function Line Drawing You can draw up to two lines in plotting area on GRAPH LIST GRAPHICS screen To draw lines you can select one of following four line modes Normal line mode can draw a line...

Page 372: ...de Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function Tangent line mode can draw tangent line to marker which is on measurement curve Regression line mode can draw regression line w...

Page 373: ...een The following scaling functions are provided Autoscaling Changes X and Y axis scaling to fit the measurement curve Zooming in Changes the scaling to half the present scaling This enlarges the meas...

Page 374: ...formation of overlaid curve instead of present information Axis information Cursor and marker position x y1 y2 Line x interrupt y1 interrupt and gradient y2 interrupt and gradient List of the data var...

Page 375: ...Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 If You Have A Problem...

Page 376: ...encounter some problem This chapter is organized into the following sections When you make a measurement This section explains how to solve the problems that may occur when making a measurement If er...

Page 377: ...Describes field where the pointer is located on the screen how to setup the field and the setting restrictions This softkey is not displayed for GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen DATA S...

Page 378: ...ions If Measured Value Oscillates when Measuring High Frequency Devices If Measured Value Oscillates when Measuring Negative Resistance If Noise Affects the Measured Values If Measured Voltage has som...

Page 379: ...transistors oscillation may cause measurement problems Normal measurement cannot be performed because of oscillation To solve this problem For FETs add resistive ferrite beads as close as possible to...

Page 380: ...feedback amplifier To solve this problem For voltage controlled negative resistance device Connect G in parallel with your DUT to cancel negative resistance To obtain an output I V curve use the foll...

Page 381: ...affect the power line waveform Shut the lid of test fixture or shield box to prevent effects of light If these are vibrations due to nearby machines or due to air flow put cushioning material under p...

Page 382: ...the effects of cable resistance connect the sense line as close as possible to the terminal of the DUT For details of Kelvin connections see Connection to Device Under Test DUT in Chapter 4 If Large C...

Page 383: ...ve this problem Measure current using a fixed range that is more than 10 mA The measurement will be performed in the specified integration time If you set many measurement channels measurement takes a...

Page 384: ...arge amount of current may flow through the DUT for a moment which may damage the DUT To solve this problem Insert a protecting resistor as close as possible to DUT You can also use a resistor of Agil...

Page 385: ...Use SMUs instead of VMUs This method degrades measurement accuracy and resolution than VMU due to each unit s specification difference 3 Insert a resistor in series to device This method needs to sel...

Page 386: ...performed in a low current range if many measurement channels are set up or if analysis such as moving a marker is performed during measurements To solve this problem Measure current using a fixed ra...

Page 387: ...ror codes and error messages are displayed If measurement or forcing stress are not performed correctly measurement data status is displayed at bottom of GRAPHICS LIST KNOB SWEEP or STRESS FORCE scree...

Page 388: ...or measurement unit The following are the error codes for measurement units Error codes are 5 digit numbers 1xxyy xx measurement unit 00 VSU1 2 and VMU1 2 01 to 06 SMU1 to SMU6 07 PGU1 2 08 GNDU 09 AD...

Page 389: ...failed default test of calibration 10031 VSUs and VMUs failed function check 10032 VSUs failed gain or offset calibration 10033 VMUs failed gain or offset calibration 10034 VMUs failed differential m...

Page 390: ...connected to VMU2 VSU1 forces 0 V 10051 VMUs and VSUs failed differential 2 V range self test This test measures 0 V by VMUs in differential mode VSU2 is connected to VMU1 and 2 and forces 0 V 10052 V...

Page 391: ...pe offset calibration 10772 PGU1 failed slope sampling calibration 10773 PGU2 failed slope sampling calibration 10875 GNDU failed offset calibration 10905 AD converter failed ROM or RAM self test 1090...

Page 392: ...23050 Parallel interface controller failed self test This test sets some settings then checks the status 23061 Host controller sends a command and does not receive acknowledge from SMU controller 230...

Page 393: ...drive 5 V power line test failed 24051 Flexible disk drive failed diskette change test 24052 Flexible disk drive failed read and write test 24062 12 V source on post regulator is not output 24063 15...

Page 394: ...not define more than 6 User Vars 9 Syntax error First char should be Alphabet 10 Syntax error Must be alphanumeric 11 Name must be set for user function variable Name setup cannot be omitted when sett...

Page 395: ...s failed for unit name Offset value is too large so Zero offset measurement is aborted 26 Too big offset for 10 pA Range of unit name Offset value is too large so offset cannot be canceled perfectly 2...

Page 396: ...to copy SRC and TGT mem num is same You cannot specify same memory number in both SOURCE and TARGET name fields 52 Illegal suffix 53 System busy Emergency handling 54 System busy Measuring 55 System b...

Page 397: ...f this error is still displayed recycle the power by turning the instrument off and then on again 64 TIFF format supports SCREEN DUMP only The TIFF format is only supported by the SCREEN DUMP function...

Page 398: ...unit 118 VAR2 output power too large for unit 119 TOT SMP TM AUTO is for LINEAR only AUTO can be specified for total sampling time only when LINEAR sampling mode is selected 120 Only LINEAR when init...

Page 399: ...st be specified 131 Assigned more than 4 SYNC channels 132 Set INIT INT 2ms for multi CH MEAS When you perform multi channel measurements initial interval must be 2 ms or more 133 Use FIXED range when...

Page 400: ...l interval 32767 or less 151 No unit is set to STANDBY ON 152 System busy MEASURING or 4145 USER MODE 153 MIN MAX have different sign in LOG 154 Can do such operation only for USER VAR 155 Illegal set...

Page 401: ...hen Knob Sweep 173 STEP must be STOP START 174 Cannot set CONT AT ANY if PCOMP is ON When you set power compliance you cannot select CONT AT ANY secondary softkey 175 CONST setup must be unit output r...

Page 402: ...Diag failed Cannot use unit 196 Compliance too low to force pulse 197 Compliance too high to force pulse 198 Two VPULSE PGUs must be same STBY 199 Two VPULSE PGUs must be same FCTN 200 Improper parame...

Page 403: ...DISK drive hardware may be in need of service 213 Filer error DISK record is not found 214 File error DISK record address error Unable to find record because the mass storage device has a problem 215...

Page 404: ...ly 229 Filer error DISK is not initialized 230 Filer error Checkread error 231 Filer error Bad HFS DISK 232 Filer error DISK is full 233 Filer error Directory is full 234 Filer error File name is unde...

Page 405: ...ameters must be output res Start stop and step value of VAR1 channel must be unit output resolution or more 293 Cal Diag aborted failed on some units Calibration or diagnostics was aborted by receivin...

Page 406: ...e nearest Agilent Technologies Sales and Service office 320 Not enough memory Cannot display 200 files The 4155B 4156B cannot display more than 199 files on the FILE CATALOG because of an internal mem...

Page 407: ...d The lpd server connection failed or was denied because the lpd server was already connected or the server was blocked 331 lpr data transfer failed Data transfer from the lpr server failed because lp...

Page 408: ...racters 344 System busy Cannot execute US US42 command Unable to move to FLEX command control mode because the US or US42 command cannot be executed while system is busy making measurement operating f...

Page 409: ...o the specified directory To access the directory change the permissions 358 Select UPDATE ADD to update add printer setup To update or add your new or modified network printer setup the UPDATE or ADD...

Page 410: ...was properly exported 372 Connection failed Socket was not sent NFS Connection failed because the socket was not sent 373 Too many levels of symbolic links The file is linked to itself or the linked f...

Page 411: ...hen connecting the network printer to the print server or NFS server 392 Network File System server is down Server for the Network File System is down Contact your network system administrator 393 Com...

Page 412: ...A A A A A A A A C AB AB AB is for X Y1 and Y2 axis respectively No Y2 for KNOB SWEEP A A A A A A A A C is for SMU1 to SMU6 VMU1 VMU2 and PGU1 2 respectively Where A B and C mean as follows A hardware...

Page 413: ...spectively Where A B and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number 1 AD converter overflow 2 Oscillation 4 Other channe...

Page 414: ...atus on STRESS STRESS FORCE screen is displayed in following format STATUS A C Where A and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexad...

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