Overview
QNP3 Hardware Manual
1.5. Vacuum Operation
Standard QNP3 stages are not designed to minimize outgassing in a vacuum environment. Aerotech can
specially prepare any of the QNP3 stages for a wide range of vacuum environments. When using a QNP3
stage that has been specially prepared for vacuum environments several additional precautions must be
taken to ensure proper operation.
1. The stage will be specially cleaned and sealed in a polyethylene bag at the factory. Do not remove the
stage from this bag until it is ready for use.
2. Only handle the stage in a clean environment using powder-free polyethylene gloves to prevent
contamination with oils and debris.
3. Use cleaned, vented, stainless steel fasteners when securing and mounting to the stage.
4. Piezo actuators cannot be operated at pressures from 10 to 10
-2
Torr. The resistance of air dramatically
reduces in this range and voltage may arc across the piezo actuator and destroy it. Remove power from
the stage and disconnect it from its drive electronics during vacuum pump down operations to protect it
from damage.
5. Baking components at elevated temperatures before installation in a vacuum chamber can greatly
reduce initial outgassing from water vapor trapped in porous surfaces. QNP3 stages contain some heat
sensitive components. Bake out temperatures should not exceed 100° C to prevent damage. If higher
baking temperatures are required contact Aerotech to discuss the application. After bake out and
vacuum chamber pump down, the piezo actuator should be repoled, as described in
before beginning normal operation.
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Chapter 1
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