1.3. Basic Specifications
Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3:
PRO560SL/SLE Series Specifications (-0300 to -0500)
-0300
-0400
-0500
Travel
300 mm
400 mm
500 mm
Accuracy
(1)
SL
Standard
±9.5 µm
±11 µm
±13 µm
Calibrated
±1.5 µm
±1.5 µm
±2 µm
SLE
Standard
±10 µm
±12 µm
±14 µm
Calibrated
±1 µm
±1 µm
±1.5 µm
Resolution
(Minimum
Incremental
Motion)
SL
0.1 µm
(2)
, 1.0 µm
(3)
SLE
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
encoder)
Bidirectional
Repeatability
(1)
SL
±1 µm
SLE
±0.5 µm
Horizontal Straightness
(1)
±3 µm
±4 µm
±5 µm
Vertical Straightness
(1)
±3 µm
±4 µm
±5 µm
Pitch
49 µrad
(10.1 arc·sec)
60 µrad
(12.4 arc·sec)
70 µrad
(14.4 arc·sec)
Roll
39 µrad
(8.0 arc·sec)
44 µrad
(9.1 arc·sec)
53 µrad
(10.9 arc·sec)
Yaw
49 µrad
(10.1 arc·sec)
60 µrad
(12.4 arc·sec)
70 µrad
(14.4 arc·sec)
Maximum Speed
(4)
220 mm/s
Maximum Acceleration
(4)
Function of motor, amplifier, payload, and maximum axial load
Load Capacity
(5)
Horizontal
150 kg
Vertical (Axial)
70 kg
Side
150 kg
Moving Mass
(with tabletop)
SL
24.6 kg
SLE
24.8 kg
Stage Mass
(no motor)
SL
63.7 kg
68.6 kg
73.5 kg
SLE
65.5 kg
70.7 kg
75.9 kg
Material
Anodized Aluminum
Mean Time Before Failure (MTBF)
20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is
payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is
used.
1.3. Basic Specifications
PRO560SL/SLE Hardware Manual
16
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