Aerotech HexGen HEX500-350HL, Hardware Manual, Page: 19 / 50

1.2. Basic Specifications
Table 1-3: HEX500-350HL Series Specifications
X Y Z A (θx) B (θy) C (θz)
Travel
(1)
100 mm 110 mm 54 mm 2­2° 22° 40°
Axis
Positioning
Accuracy
(2,3)
Full
Travel
Standard (-
PL3)
±4 μm ±4 μm ±3 μm
±50 μrad
(±10.3
arc-sec)
±50 μrad
(±10.3
arc-sec)
±25 μrad
(±5.2 arc-
sec)
ULTRA
(-PL4)
±1 μm ±1 μm ±0.75 μm
±10 μrad
(±2.1 arc-
sec)
±10 μrad
(±2.1 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
Limited
Travel
(7)
Standard (-
PL3)
±1.25 μm
±12.5
μrad
(±2.6 arc-
sec)
±12.5
μrad
(±2.6 arc-
sec)
±7.5 μrad
(±1.5 arc-
sec)
ULTRA
(-PL4)
±0.75 μm ±0.75 μm ±0.5 μm
±5 μrad
(±1.0 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
±2.5 μrad
(±0.5 arc-
sec)
Resolution
(Minimum Incremental Motion)
20 nm
0.2 μrad
(0.04 arc sec)
Bidirectional
Repeatability, pk-pk
(3)
±0.6 μm ±0.6 μm ±0.35 μm ±1 μrad (±0.2 arc sec)
Unidirectional
Repeatability, pk-pk
±0.25 μm ±0.25 μm ±0.15 μm ±0.5 μrad (±0.1 arc sec)
Maximum Speed
(4)
50 mm/s 50 mm/s 25 mm/s 10 °/s 10 °/s 20 °/s
Load Capacity,
All Positions
(5)
Vertical 200 kg (Push); 120 kg (Pull)
Horizontal 35 kg
Holding Capacity,
De-Energized
(6)
165 kg
Stage Mass 49 kg
Material
Anodized Aluminum Platform and Base;
Steel Used in Joints and Inside Struts
1. Travels are mutually-exclusive. Consult the HexGen
®
Hexapod Sizer on the Aerotech website for detailed workspace
sizing.
2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint
dependent.
3. X, Y, Z performance certified as standard. X, Y, Z, A, B, C performance certified with -PL4.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Centered loading (refer to
Section 2.3. ).
6. Horizontal base plate, centered loading (refer to Section 2.3. ).
7. Over any 20 mm (X, Y, Z) or 5° (A, B, C)
Hardware Manual HEX500-350HL
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