Mechanical Specifications and Installation
ANT95V-3 Hardware Manual
2.2. Flexure Handling
The ANT95V-3 stage uses flexures to laterally constrain the tabletop so it will move vertically as the drive
wedge moves horizontally. The flexures are engineered to provide smooth, repeatable motion for the entire
life of the stage. They are made of thin steel, however, and can fail if they are mishandled. Do not remove the
cover from the stage unless it is absolutely necessary. When the cover is off, take care not to bend, nick,
ding, or mar the flexures in any way. Never handle the stage by the flexures or flexure mounting supports. If
a flexure appears damaged, contact Aerotech support.
14
Chapter 2
www.aerotech.com
