1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3:
ANT130L Series Specifications
-035
-060
-110
-160
-210
Travel
35 mm
60 mm
110 mm
160 mm
210 mm
Accuracy
(1)
-PL1
±2 µm
±2 µm
±3 µm
±4 µm
±4 µm
-PL2 (-E1, -E2)
±250 nm
±250 nm
±275 nm
±275 nm
±300 nm
-PL2 (-E4)
±175 nm
±175 nm
±200 nm
±200 nm
±225 nm
Bidirectional Repeatability
(1)
±75 nm
Resolution (Minimum
Incremental Motion)
-E1
1 nm
-E4
0.5 nm
Straightness
(1)
±1.0 µm
±1.0 µm
±1.0 µm
±1.5 µm
±1.5 µm
Flatness
(1)
±1.0 µm
±1.0 µm
±1.0 µm
±1.5 µm
±1.5 µm
Pitch
10 arc sec
Roll
10 arc sec
Yaw
5 arc sec
Maximum Speed
(2)
-E1, -E4
350 mm/s
-E2
145 mm/s
Maximum Acceleration (No Load)
(2)
1 g
In-Position Stability
(3)
-E1
<1 nm
-E4
<0.5 nm
Load Capacity
(4)
Horizontal
12.0 kg
Side
10.0 kg
Moving Mass
1.3 kg
1.4 kg
1.9 kg
2.3 kg
2.7 kg
Stage Mass
2.6 kg
3.0 kg
3.8 kg
4.6 kg
5.5 kg
Material
Anodized Aluminum
Mean Time Between Failure
30,000 Hours
1. Certified with each stage.
2. Requires the selection of an applicable amplifier with sufficient voltage and current.
3. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
4. Payload specifications assume that the payload is centered on-axis.
5. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend
upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
6. -PL2 performance requires the use of an Aerotech controller.
7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
ANT130L Hardware Manual
1.3. Basic Specifications
www.aerotech.com
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