ABL1000 Hardware Manual
Overview
1.3. Basic Specifications
Table 1-3:
ABL1000 Series Specifications
Model
ABL1000-025
ABL1000-050
ABL1000-100
Travel
25 mm
50 mm
100 mm
Drive System
Linear Brushless Servomotor
Resolution
-E1
2.5 nm
-E2
0.5 nm
Maximum Travel Speed
(1)
300 mm/s
Maximum Linear Acceleration
1 g - 10m/s
2
(no load)
Maximum Horizontal Load
(2)
15.0 kg
Accuracy
(1)
-E1
±0.3 µm
(3)
±2 µm
±0.3 µm
(3)
±2 µm
±0.3 µm
(3)
±5 µm
-E2
±0.2 µm
(3)
±1 µm
±0.2 µm
(3)
±1 µm
±0.2 µm
(3)
±2 µm
Repeatability
-E1
±50 nm
-E2
(3)
±50 nm
(1)
; ±100 nm
Straightness and Flatness
(4)
±0.25 µm
±0.25 µm
±0.4 µm
Pitch and Yaw
±0.25 arc sec
±0.50 arc sec
±1.0 arc sec
Nominal Stage Weight
4.5 kg
5.5 kg
6.4 kg
Moving Mass
1.9 kg
Operating Pressure
(5)
80 psi ±5 psi
Air Consumption
(6)(7)
17.5 SLPM
Construction
Aluminum Body/Hardcoat
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system
resolution.
(2) Max load for XY configuration is 10.0 kg.
(3) Values with Aerotech controls and -PL2 metrology option.
(4) Dependent on flatness of stage mounting surface.
(5) To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-Stop is
recommended.
(6) Air supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.
(7) Maximum expected air consumption for single axis.
NOTE: Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload
and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
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Chapter 1
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