Advanced Energy HFV 8000, User Manual

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5705211-C Product Overview and Theory 2-1
Chapter
HFV 8000 Generator
Chapter
2
Product Overview and Theory
GENERAL DESCRIPTION
This HFV generator is an 8-kilowatt, high-efficiency, 1.765-megahertz to 2.165-
megahertz generator intended for continuous, heavy use in a vacuum chamber
environment. The generator employs Advanced Energy’s patented RF circuit
topology in a compact, rack-mountable enclosure.
Designed to regulate on forward power or load (delivered) power into a broad range of
output impedances, the HFV generator can operate in
center frequency mode or in
automatic tuning mode. Direct digital synthesis (DDS) continually adjusts the
operating frequency in order to minimize the reflected power for a given load
impedance. Both center frequency and automatic tuning modes support operation into
a fixed impedance matching network, which simplifies system complexity, increases
reliability, and improves process-to-process repeatability. Automatic tuning mode
continuously minimizes the mismatch to the generator. This mode is available while
in forward power regulation mode. In load power regulation, an initial frequency
sweep is performed to determine the frequency that yields the minimum reflected
power. For operation instructions, see
“First-Time Operation” on page 5-8 and
“Normal Operation” on page 5-12 .
You can control the HFV generator through a 15-pin, custom analog Generator User
port (see “Generator User Port (15-Pin)” on page 4-1 ) or through a DeviceNet ™
interface (see “DeviceNet™ Port” on page 4-37 ). DeviceNet is an electrically isolated
interface installed with either a 5-pin, 12-millimeter “Micro” Lumberg RSF 5/0.5 or
Turck FS 4.5 series connector. This interface supports the DeviceNet Group 2 I/O Poll
Command message and Group 1 I/O Poll Response message for data transfer. You
may configure MAC ID and baud rate settings through rotary switches, or you may
program a DeviceNet master. Module Status and Network Status indicators are
provided in accordance with the DeviceNet specification, in addition to isolated
Module Status and Network Status drive signals on the 15-pin
Generator User port
for remote indicators. See “DeviceNet™ Operation” on page 4-53 for more
information. You can also control the frequency and frequency tuning algorithm
through the generator’s serial
Host port, which is RS-232, RS-422, and RS-485
compatible (see “Serial I/O Host Port (RS-232 With AE Bus)” on page 4-9 ).
In addition, Advanced Energy has Virtual Front Panel (VFP) software available for
purchase. With VFP software, you can control most generator functions and monitor
the HFV generator using a personal computer. To order VFP software, contact your
AE sales representative (for contact information, see
Table 6-1 on page 6-10 ).