104
Glossary
Acoustical Optical Modulator (AOM)
An electronic device which diffracts laser light to interrupt the laser beam as an on/off switch.
Analog-to-Digital Conversion (ADC)
Converts an analog signal to a digital signal.
Beam profile
A pattern of circles or numbers representing the spatial distribution of laser beam power. This
power distribution automatically calculates drawing speeds to determine whether the laser should
be adjusted or replaced, and to indicate whether the optics should be adjusted, replaced, or
cleaned.
Beam profiler
A UV-sensitive detector over which the laser beam is moved to generate beam profiles. Two beam
profilers are mounted in the process chamber.
Border
A vector that defines the perimeter of a layer. Hatch and fill vectors are drawn between borders.
70696 Revision 1C 27-Aug-08